METHOD FOR PRODUCING TRANSPARENT GAS BARRIER FILM, APPARATUS FOR PRODUCING TRANSPARENT GAS BARRIER FILM, AND ORGANIC ELECTROLUMINESCENCE DEVICE

摘要

A method for producing a transparent gas barrier film of the present invention is performed using a roll-to-roll method. The method includes depositing a plurality of layers on a long belt-shaped resin substrate 8 by alternately passing the long belt-shaped resin substrate 8 through a deposition area in which a material containing at least one of metals and semimetals is deposited by generating a plasma and a non-deposition area in which the material is not deposited, wherein a transparent gas barrier layer including the plurality of layers each continuously changing in density in the thickness direction is formed on the resin substrate 8 by changing a distance between the resin substrate 8 and a plasma source 52 in the deposition area.

主权项

1. A method for producing a transparent gas barrier film using a roll-to-roll method, the method comprising:
depositing a plurality of layers on a long belt-shaped resin substrate by alternately passing the resin substrate through a deposition area in which a material containing at least one of metals and semimetals is deposited by generating a plasma and a non-deposition area in which the material is not deposited, while feeding the resin substrate so as to draw a helical conveyance track, wherein a transparent gas barrier layer including the plurality of layers each continuously changing in density in the thickness direction is formed on the resin substrate by changing a distance between the resin substrate and a plasma source in the deposition area.