CAP TYPE ELECTROSTATIC CHUCK HAVING HEATER AND METHOD OF MANUFACTURING THE SAME

摘要

The present invention relates to a cap type electrostatic chuck equipped with a heater and a method for manufacturing the same. A ceramic material replaces a role of an aluminum heat-diffusion plate while the present invention protects an electrode and a heater pattern. According to one embodiment of the present invention, the cap type electrostatic chuck equipped with a heater comprises: a cap type dielectric having the electrode therein; a cap type insulator coupled to a lower surface of the cap type dielectric by a first bonding layer and having the heater pattern therein; and a base body coupled to the lower surface of the cap type dielectric by a second bonding layer.