用于产生检查装置之照像装置用定时信号之控制装置，以及对照像装置送出定时信号之方法;CONTROL APPARATUS FOR GENERATING TIMING SIGNAL FOR IMAGE PICKUP APPARATUS IN INSPECTION APPARATUS AND METHOD OF DELIVERING TIMING SIGNAL TO IMAGE PICKUP APPARATUS

摘要

本发明系能抑制起因于用以检测检查装置之检查对象的移动量之雷射干涉计的分解能和相当于取得画像1画素的距离之比不为整数倍之情形而产生的位置误差的累积。;一边将检查对象移动于预定的方向且一边以照像装置将检查对象摄影的检查装置中用以产生照像装置用定时信号之控制装置，其系具备：移动量判定部，其系根据自用以检测检查对象的移动量之雷射干涉计而取得整数值之计数值而检测检查对象的移动量，并判定检测出的移动量是否达临界值；以及定时信号产生部，其系在判定检测出的移动量达临界值时，产生定时信号。;移动量判定部系选择性的使用复数之值作为临界值而进行判定。;This invention provides a control apparatus for generating timing signal for image pickup apparatus in the inspection apparatus, which moves the inspection object toward a predetermined direction while imaging the inspection object by the image pickup apparatus. The control apparatus comprises a determination unit and a timing signal generation unit; wherein the determination unit detects the moving amount of the inspection object based on the count value obtained from a laser interferometer, which is for detecting the integer value of the moving amount of the inspection object, and determines whether the detected moving amount reaches the threshold value or not; the timing signal generation unit generates a timing signal when it is determined that the detected moving amount has reached the threshold. ;The determination unitselectively uses a plurality of values as threshold to perform the determination.