发明名称 |
CALCULATION APPARATUS, PHASE VALUE OBTAINING SYSTEM, AND PHASE IMAGE OBTAINING METHOD |
摘要 |
A calculation apparatus that integrates a differential phase image and obtains a phase image includes a weighting unit and an integration unit. The weighting unit performs weighting of a differential phase image that has a plurality of differential phase values, each of the differential phase values being obtained by using intensity information of a plurality of pixels included in one intensity distribution formed by a differential interferometer, and obtains a weighted differential phase image. The integration unit integrates the weighted differential phase image and obtains a phase image. The weighting unit performs weighting of the differential phase values in accordance with a position in the differential phase image, such that at least a part of differential phase values in end parts of the differential phase image is weighted more lightly than a differential phase value in a central part of the differential phase image. |
申请公布号 |
US2015323303(A1) |
申请公布日期 |
2015.11.12 |
申请号 |
US201514704159 |
申请日期 |
2015.05.05 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Kondoh Takeshi |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
1. A calculation apparatus that integrates a differential phase image and obtains a phase image, the calculation apparatus comprising:
a weighting unit that performs weighting of a differential phase image that has a plurality of differential phase values, each of the differential phase values being obtained by using intensity information of a plurality of pixels included in one intensity distribution formed by a differential interferometer, and obtains a weighted differential phase image; and an integration unit that integrates the weighted differential phase image and obtains a phase image, wherein the weighting unit performs weighting of the differential phase values in accordance with a position in the differential phase image, and performs weighting of at least a part of differential phase values in end parts of the differential phase image more lightly than a differential phase value in a central part of the differential phase image. |
地址 |
Tokyo JP |