OPTICAL APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

摘要

The present invention provides an optical apparatus which deforms a reflecting surface of a mirror, wherein the optical apparatus comprises: a base plate; a plurality of actuators which are disposed between the base plate and the mirror and are configured to apply a force to the mirror; a detecting unit configured to detect vibration generated in the base plate; and a control unit configured to control each actuator depending on a result of detection performed by the detecting unit such that a deformation of the mirror caused as a result of the vibration generated in the base plate is within an acceptable range.