| 摘要 |
PROBLEM TO BE SOLVED: To enhance accuracy of interlock control.SOLUTION: A CMP device includes a plurality of components used for processing a substrate, a housing 1 for housing the plurality of components, a plurality of identification members 312A, 314A, 316A provided in the housing 1 and different from the plurality of components, an image pickup section 320A provided in the door 35A of the housing 1 on the inside thereof, and an operation control section 330 for stopping operation of the plurality of components, when the plurality of identification members 312A, 314A, 316A are not included in the images captured by the image pickup section 320A. |
