发明名称 REDUCTION OF THERMO-OPTIC EFFECTS IN SILICON PHOTONICS
摘要 A method and system are described for reducing a thermo-optic effect in silicon photonics. In described embodiments, the system comprises a silicon photonic device with a silicon core that includes a cladding layer comprising titanium adjacent to the silicon core. In described embodiments, the method comprises providing a silicon core and depositing a cladding layer adjacent to the silicon photonic core, wherein the cladding layer comprises titanium.
申请公布号 US2015309253(A1) 申请公布日期 2015.10.29
申请号 US201514697169 申请日期 2015.04.27
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 Yoo Sung-Joo Ben
分类号 G02B6/122;G02B6/132;C23C14/00;C23C14/35;C23C14/08;C23C14/58;G02B1/02;G02F1/025 主分类号 G02B6/122
代理机构 代理人
主权项 1. A silicon photonic device, comprising: a silicon core; and a cladding layer comprising titanium adjacent to the silicon core.
地址 Oakland CA US