发明名称 PLACEMENT MEMBER AND METHOD OF MANUFACTURING THE SAME
摘要 A placement member (1) in accordance with an embodiment of the present invention includes a base (4) having a placement section (3) on which an object (2) is placed, and a coating film (5) that coats at least a part of the placement section (3). The placement section (3) has a bottom face (8), a plurality of projections (9) projecting from the bottom face (8), and an annular protrusion (10) that protrudes from the bottom face (8) at the same height as the plurality of projections (9) and surrounds the plurality of projections (9). The coating film (5) has a first region (15) that coats top faces (11) of the projections (9) and a second region (16) that coats a top face (13) of the annular protrusion (10) and has a smaller thickness than that of the first region (15).
申请公布号 US2015311108(A1) 申请公布日期 2015.10.29
申请号 US201314648221 申请日期 2013.11.14
申请人 KYOCERA CORPORATION 发明人 HORIUCHI Masahiko
分类号 H01L21/687;G03F7/20;B05D7/00 主分类号 H01L21/687
代理机构 代理人
主权项 1. A placement member comprising: a base including a placement section on which an object is placed; and a coating film that coats at least a part of the placement section, wherein the placement section has a bottom face, a plurality of projections protruding from the bottom face, and an annular protrusion that protrudes from the bottom face at the same height as the plurality of projections and surrounds the plurality of projections, and the coating film has a first region that coats top faces of the projections, and a second region that coats a top face of the annular protrusion and has a smaller thickness than that of the first region.
地址 Kyoto-shi, Kyoto JP
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