发明名称 OPTIMISED METHOD FOR PRODUCING ELECTROLUMINESCENT NANOWIRES
摘要 A process for fabricating an array of nanowires on the surface of a substrate, the nanowires comprising a portion capable of emitting radiation under action of an electrical or optical control and at least partially connected to one another electrically via a conductive upper layer, comprises steps allowing a subset of defective nanowires to be identified among active nanowires, the steps comprising: producing a layer of negative photoresist sensitive to the emission wavelength, covering the array of the nanowires; activating the array of the nanowires under electrical control or optical control so the active nanowires emit the radiation, the radiation decreasing the solubility of the negative resist; developing the resist level with the defective nanowires, leaving zones made less soluble and encircling the active nanowires; and removing the conductive layer above the defective nanowires. A process for fabricating one or more light-emitting diodes using the process is provided.
申请公布号 EP2936572(A1) 申请公布日期 2015.10.28
申请号 EP20130774430 申请日期 2013.10.10
申请人 ALEDIA 发明人 CAGLI, CARLO
分类号 H01L33/08;H01L21/02;H01L29/06;H01L33/00;H01L33/18;H01L33/24 主分类号 H01L33/08
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