| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress gas resonance between electrodes, without being affected by thermal expansion of upper and lower electrodes, in a gas laser oscillator.SOLUTION: In a gas laser oscillator for oscillating a laser by ionizing gas between a pair of electrodes and generating plasma, covers surrounding an electrode gap are provided on both side faces of an electrode member in the transverse direction. The covers are fixed to only one electrode, and have a predetermined distance to the other electrode. In some example, the distance is preferably in a range of 0.05 mm≤d≤0.4 mm.</p> |
