| 摘要 |
PROBLEM TO BE SOLVED: To perform alignment of a carrier and a substrate with high accuracy even if it is impossible to focus an imaging means simultaneously on both alignment marks formed, respectively, on the carrier and the substrate.SOLUTION: From an image IM captured by means of a CCD camera via a transparent blanket, centroid positions G1 m and G2 m of an alignment pattern AP1 on the substrate side and an alignment pattern AP2 on the blanket side are determined by image processing. For the alignment pattern AP2 on the blanket side, the position of the centroid G2 m is specified from an image captured in focused state by a processing with edge extraction. For the alignment pattern AP1 on the substrate side captured in non-focused state where the contour is blurred, high spatial frequency components are removed and low frequency components are extracted, and the position of the centroid G1 m is specified from the results. |
