CHARGED PARTICLE BEAM APPARATUS

摘要

In order to provide a charged particle beam apparatus capable of high resolution measurement of a sample at any inclination angle, a charged particle beam apparatus for detecting secondary charged particles (115) generated by irradiating a sample (114) with a primary charged particle beam (110) is provided with a beam tilt lens (113) having: a yoke magnetic path member (132) and a lens coil (134) to focus the primary charged particle beam (110) on the sample (114); and a solenoid coil (133) configured to arrange the upper end on the side surface of the yoke magnetic path member (132) and arrange the bottom end between the tip end of the pole piece of the yoke magnetic path member (132) and the sample (114) in order to arbitrarily tilt the primary charged particle beam (110) on the sample (114).

主权项

1. A charged particle beam apparatus irradiating a primary charged particle beam to a sample loaded on a stage to detect secondary charged particles generated by the irradiation,
wherein the charged particle beam apparatus includes a beam tilt lens having a function of focusing the primary charged particle beam on the sample and tilting the primary charged particle beam onto the sample at a given angle, the beam tilt lens is a member with a hollow inside provided along a region surrounding the primary charged particle beam, has a gap for a pole piece at a bottom aperture end on a side opposing the sample, and further includes: a yoke magnetic path member characterized by having a lens coil therein; a solenoid coil arranged in a manner such as to surround the pole piece at the central aperture end of the yoke magnetic path member from outside; a lens coil power source supplying current to the lens coil to control a focus position of the primary charged particle beam; and a solenoid coil power source supplying current to the solenoid coil to control a tilt angle of the primary charged particle beam, and the solenoid coil has an upper end arranged on a side surface of the yoke magnetic path member and has a lower end arranged between the pole piece tip of the yoke magnetic path member and the sample.