GROWTH CONTROL METHOD OF AU DROPLETS ON SI AND METHOD OF DEPOSITING AU USING THE SAME

摘要

According to an aspect of the present invention, provided is a growth control method of Au droplets on a silicon substrate, wherein in an Au depositing method for depositing Au droplets on top of a Si substrate via a self-assembly method under a vacuum chamber of 1 × 10-4 Torr using a pulse laser deposition method, one or more properties among the average height, the diameter of a side surface and the surface area ratio of density of the deposited Au nanostructure are adjusted by either or both of the temperature of heat treatment in the process of deposition and the deposited amount of Au.