METHOD FOR APPLICATION OF ELECTROCONDUCTIVE COATING FOR ELECTRICALLY-HEATED ORGANIC GLASS ELEMENT

摘要

FIELD: electricity.SUBSTANCE: reactive magnetron sputtering of metal target is carried out in atmosphere of mixture of inert gas and reactive gas with precipitation of the above coating to polymer film. The target made of indium and stannum alloy is used as metal target. Precipitation of coating of indium oxide doped with stannum is performed to polymer film with permanent rate ensured by maintenance of permanent difference between total pressure values of the above gas mixture before commencement of reactive magnetron sputtering of metal target and total pressure value of gas mixture in process of the coating precipitation. At that the above difference is maintained by permanent regulation of reactive gas consumption rate, and gas selected of the group including oxygen, air and carbon dioxide gas is used as reactive gas.EFFECT: lesser spread in optical and physical characteristics of the electroconductive transparent coating at high optical transmission and reduced specific resistance.1 tbl, 8 ex