发明名称 METHOD FOR FORMING MEMORY DEVICE
摘要 A method includes forming a resistance-switching layer and a second electrode over a first electrode. The method includes applying a forming voltage to the resistance-switching layer such that the resistance of the resistance-switching layer is decreased. The method includes applying an initial reset voltage to the first electrode or the second electrode such that the resistance of the resistance-switching layer is increased. The method includes applying a first set voltage to the first electrode or the second electrode such that the resistance of the resistance-switching layer is decreased. The method includes applying a second reset voltage to first electrode or the second electrode such that the resistance of the resistance-switching layer is increased. The method includes applying a second set voltage to first electrode or the second electrode such that the resistance of the resistance-switching layer is decreased. The second set voltage is lower than the first set voltage.
申请公布号 US2015287919(A1) 申请公布日期 2015.10.08
申请号 US201414474883 申请日期 2014.09.02
申请人 Winbond Electronics Corp. 发明人 LIN Meng-Heng;WU Bo-Lun
分类号 H01L45/00 主分类号 H01L45/00
代理机构 代理人
主权项 1. A method for forming a memory device, comprising: forming a resistance-switching layer over a first electrode; forming a second electrode over the resistance-switching layer; applying a forming voltage to the resistance-switching layer such that the resistance of the resistance-switching layer is decreased; after the forming voltage is applied, applying an initial reset voltage to the first electrode or the second electrode such that the resistance of the resistance-switching layer is increased; after the initial reset voltage is applied, applying a first set voltage to the first electrode or the second electrode such that the resistance of the resistance-switching layer is decreased; after the first set voltage is applied, applying a second reset voltage to the first electrode or the second electrode such that the resistance of the resistance-switching layer is increased; and after the second reset voltage is applied, applying a second set voltage to the first electrode or the second electrode such that the resistance of the resistance-switching layer is decreased, wherein the second set voltage is lower than the first set voltage.
地址 Taichung City TW