| 摘要 |
PURPOSE:To obtain a vibrator with excellent characteristics in terms of aging, a Q value, temperature characteristics, etc., by using a substance which has no piezoelectric characteristics but has excellent characteristics as a metarial for the vibrator. CONSTITUTION:On the flank of a vibrator made of single-crystal member 1 with no piezoelectric characteristics, a thin film of a conductive substance such as metal is formed as lower electrode 2 and a thin-film piezoelectric material of ZnO, etc., is also formed as thin-film piezoelectric layer 3. Further, upper electrode 4 is formed on this thin-film piezoelectric layer 3 and connected to the other upper electrode formed similarly on the flank opposing to the electrode 4 by using lead electrode 5. Then, oscillation circuit 9 is connected, and consequently piezoelectric films 3 and 7 repeat expansion and contraction to vibrate at the natural frequency of single- crystal member 1. |
