| 发明名称 | Load port apparatus | ||
| 摘要 | To prevent an inert gas from stagnating in an internal space of a mount base of a load port apparatus, the load port apparatus includes: an outside air supply device for introducing an air from an external space, in which an operator works, into the internal space of the mount base; a casing surrounding a space in which a drive mechanism for a door is arranged; and a duct through which a gas inside the internal space of the casing is dischargeable. | ||
| 申请公布号 | US9153468(B2) | 申请公布日期 | 2015.10.06 |
| 申请号 | US201213541101 | 申请日期 | 2012.07.03 |
| 申请人 | TDK Corporation | 发明人 | Emoto Jun;Iwamoto Tadamasa;Miyajima Toshihiko |
| 分类号 | B65B31/00;H01L21/677 | 主分类号 | B65B31/00 |
| 代理机构 | Oblon, McClelland, Maier & Neustadt, L.L.P. | 代理人 | Oblon, McClelland, Maier & Neustadt, L.L.P. |
| 主权项 | 1. A load port apparatus, comprising: a side base serving as part of a wall that partitions a mini-environment; a door capable of closing an opening portion provided in the side base, the door being configured to hold a lid of a sealed container for containing an object to be contained, and open and close the lid of the sealed container so that the object to be contained is insertable into and removable from the sealed container; a mount base on which the sealed container is placeable, the mount base being capable of bringing the sealed container close to and apart from the opening portion; and an outside air supply device capable of introducing, into an internal space of the mount base, a gas in an external space separated from the mini-environment by the side base. | ||
| 地址 | Tokyo JP | ||