发明名称 SHEET STICKING DEVICE AND STICKING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a sheet sticking device capable of preventing an outer edge of an adhesive sheet from being floated from an adherend, and a sticking method.SOLUTION: A sheet sticking device 10 includes: supply means 20 for supplying an adhesive sheet AS; pressing means 30 for pressing the supplied adhesive sheet AS on an adherend WF; and moving means 40 for relatively moving the pressing means 30 and the adherend WF along an adhesion face WF1 of the adherend WF. The pressing means 30 is provided to perform a pressure change operation for reducing pressure gradually from one end of the adhesive sheet AS to a central part and increasing the pressure gradually from the central part of the adhesive sheet AS to another end, and performs a first pressing operation for implementing the pressure change operation while being relatively moved in a first sticking direction by the moving means 40, and a second pressing operation for implementing the pressure change operation while being relatively moved in a second sticking direction crossing the first sticking direction.</p>
申请公布号 JP2015177179(A) 申请公布日期 2015.10.05
申请号 JP20140055153 申请日期 2014.03.18
申请人 LINTEC CORP 发明人 KUROSAWA YUTA
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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