发明名称 |
半导体装置及其制造方法;SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME |
摘要 |
一种半导体装置,包括:一半导体层;一第一掺杂井区,设置于该半导体层之一部内;一第一掺杂区,位于该第一掺杂井区内;具有不对称剖面轮廓之一第二掺杂井区,设置于该半导体层之另一部内;一第二掺杂区、一第三掺杂区与一第四掺杂区,设置于该第二掺杂井区之内;一第一闸极结构,设置于该半导体层之一部上且部分覆盖该第二掺杂井区;以及一第二闸极结构,埋设于该半导体层之一部内并穿透该第二掺杂井区之一部。; a first doped well region disposed in a portion of the semiconductor layer; a first doped region disposed in the first doped well region; a second doped well region of an asymmetrical cross section disposed in another portion of the semiconductor layer; second, third, and fourth doped regions formed in the second doped well region; a first gate structure disposed over a portion of the semiconductor layer, practically covering the second doped well region; and a second gate structure embedded in a portion of the semiconductor layer, penetrating a portion of the second doped well region. |
申请公布号 |
TW201537626 |
申请公布日期 |
2015.10.01 |
申请号 |
TW103111644 |
申请日期 |
2014.03.28 |
申请人 |
世界先进积体电路股份有限公司 VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION |
发明人 |
张雄世 CHANG, HSIUNG SHIH;张睿钧 CHANG, JUI CHUN;杜尙晖 TU, SHANG HUI;苏里彦托 皮约诺 SULISTYANTO, PRIYONO TRI;李家豪 LEE, CHIA HAO |
分类号 |
H01L21/22(2006.01);H01L21/336(2006.01) |
主分类号 |
H01L21/22(2006.01) |
代理机构 |
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代理人 |
洪澄文颜锦顺 |
主权项 |
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地址 |
新竹县新竹科学工业园区园区三路123号 TW |