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发明名称
具有用于改善温度分布之外部流量调整的静电吸座;ELECTROSTATIC CHUCK WITH EXTERNAL FLOW ADJUSTMENTS FOR IMPROVED TEMPERATURE DISTRIBUTION
摘要
说明一种静电吸座,具有用于改善温度分布之外部流量调整。在一个例子中,设备具有介电圆盘以静电力抓取矽晶圆。冷却板系紧固并热耦合至陶瓷圆盘。供应气室接收来自外部源的冷却剂,且复数个冷却剂腔室系热耦合至冷却板,并接收来自供应气室的冷却剂。返回气室系耦接至冷却区域,以从冷却区域排出冷却剂,且复数个流量控制阀系设于供应气室和冷却区域之各者间,以控制从供应气室到冷却区域的冷却剂流速。
申请公布号
TW201537672
申请公布日期
2015.10.01
申请号
TW103146117
申请日期
2014.12.29
申请人
应用材料股份有限公司 APPLIED MATERIALS, INC.
发明人
布薛马修J BUSCHE, MATTHEW J.;帕克维杰D PARKHE, VIJAY D.;波亚二世威德 BOYD, JR., WENDELL;萨奇山恩 THACH, SENH;马可拉契夫康斯坦汀 MAKHRATCHEV, KONSTANTIN;小野真德 ONO, MASANORI
分类号
H01L21/683(2006.01)
主分类号
H01L21/683(2006.01)
代理机构
代理人
蔡坤财李世章
主权项
地址
美国 US
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