发明名称 PRODUCTION METHOD FOR NITRIDE SEMICONDUCTOR LIGHT EMITTING DEVICE
摘要 The present invention provides a production method for a nitride semiconductor light emitting device, which warps less after removing the substrate, and which can emit light from the side thereof; specifically, the present invention provides a production method for a nitride semiconductor light emitting device comprising: forming stacked layers by stacking at least an n-type semiconductor layer, a light emitting layer, and a p-type semiconductor layer on a substrate in this order; forming grooves which divide the stacked layers so as to correspond to nitride semiconductor light emitting devices to be produced; filling the grooves with a sacrifice layer; and forming a plate layer on the p-type semiconductor layer and the sacrifice layer by plating.
申请公布号 KR20080033540(A) 申请公布日期 2008.04.16
申请号 KR20087005871 申请日期 2006.09.14
申请人 SHOWA DENKO KABUSHIKI KAISHA 发明人 OSAWA HIROSHI;HODOTA TAKASHI
分类号 H01L21/20;H01L33/00 主分类号 H01L21/20
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