发明名称 Measuring scale with a reflective phase jitter
摘要 <p>The rod (1) has a reflective phase grating provided with alternating high and low refractive layers (6, 7, 5a, 5b) in a layer stack (3). The stack is arranged on a substrate (2). The high and low refractive layers are made of silicon and silicon dioxide, respectively. A base layer (4) e.g. nickel-chromium layer, facing the substrate is provided in the stack. Layer thickness in the stack is selected such that a light used for sampling the rod is diffracted in a diffracting arrangement. The substrate is made of zerodur(RTM: Glass ceramic).</p>
申请公布号 EP1865280(A1) 申请公布日期 2007.12.12
申请号 EP20070002493 申请日期 2007.02.06
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 FLATSCHER, GEORG
分类号 G01B5/18;G01D5/347 主分类号 G01B5/18
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