发明名称 Moving beam with respect to diffractive optics in oder to reduce interference patterns
摘要 A system and method are used to form incoherent beams from at least a partially coherent beam, such that interference or speckle patterns are substantially eliminated. A rotating optical element directs the partially coherent beam to reflect from an angular distribution changing element to form an incoherent beam. The partially coherent beam can be directed at varying angles or positions onto the angular distribution changing element through rotation of the rotating optical element. The angles can vary as a function of time.
申请公布号 EP1845418(A2) 申请公布日期 2007.10.17
申请号 EP20070251500 申请日期 2007.04.04
申请人 ASML NETHERLANDS BV 发明人 VISSER, HUIBERT;BASELMANS, JOHANNES JACOBUS MATHEUS;DE JAEGER, PIETER WILLEM HERMAN;VINK, HENRI JOHANNES PETRUS
分类号 G03F7/20 主分类号 G03F7/20
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