| 摘要 |
PROBLEM TO BE SOLVED: To provide a stress measurement apparatus by laser Raman spectroscopy, capable of achieving precise stress measurement without receiving the effect due to temperature changes. SOLUTION: The stress measurement apparatus by laser Raman spectroscopy includes a laser light source 2, a spectrometer 4, a detector 5, a pair of same axis lenses 6r, 6s for a reference and sample, and a specimen chamber 3. A pair of shutters 7r, 7s shutting at least one of an optical path of laser light, irradiated on the reference R and sample S stored in the specimen chamber 3 and an optical path of scattering light are provided. The shutters 7r, 7s are opened and closed alternately, and stress of the reference R and the sample S can be measured alternately. COPYRIGHT: (C)2007,JPO&INPIT
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