| 摘要 |
PROBLEM TO BE SOLVED: To readily and surely penetrate an insulation layer without raising the ejection pressure of gas. SOLUTION: The insulation layer 93 is formed between a base substrate 10 having a first reference hole 16 passing therethrough in the thickness direction and a bonding substrate 30 which is bonded to one face side of the base substrate 10 and has a second reference hole 35 passing therethrough in the thickness direction provided at a region opposite to the first reference hole 16, the insulation layer 93 adapted to insulate the first reference hole 16 from the second reference hole 35. When a hole is formed through the insulation layer 93 by abutting gas ejected from an ejection nozzle 200 thereto, at least a part of an ejection region to which the gas is abutted is opposed to the first reference hole 16 or the second reference hole 35, the center of the inner circumference of the ejection nozzle 200 is shifted from the center of the inner circumference of the first reference hole 16 or the second reference hole 35 in the face direction of the base substrate 10, and then the hole is formed through the insulation layer 93. COPYRIGHT: (C)2007,JPO&INPIT
|
