发明名称 DIELECTRIC MATERIALS FOR ELECTRONIC DEVICES
摘要 A dielectric material prepared from a siloxy/metal oxide hybrid composition, and electronic devices such as thin film transistors comprising such dielectric material are provided herein. The siloxy/metal oxide hybrid composition comprises a siloxy component such as, for example, a siloxane or silsesquioxane. The siloxy/metal oxide hybrid composition is useful for the preparation of dielectric layers for thin film transistors using solution deposition techniques
申请公布号 US2007085113(A1) 申请公布日期 2007.04.19
申请号 US20060558015 申请日期 2006.11.09
申请人 XEROX CORPORATION 发明人 WU YILIANG;ONG BENG S.;LIU PING
分类号 H01L29/76 主分类号 H01L29/76
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