The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.
申请公布号
WO2007044298(A2)
申请公布日期
2007.04.19
申请号
WO2006US38448
申请日期
2006.09.29
申请人
THE BOC GROUP, INC.;HOLLAND, PETER, JOHN;WILSON, KATE;STEPHENSON, DAWN
发明人
HOLLAND, PETER, JOHN;WILSON, KATE;STEPHENSON, DAWN