| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface treatment apparatus and a surface treatment method with which distribution of strength of plasma is made uniform by uniforming a standing wave generated between a pair of electrodes in application of VHF plasma to surface treatment, and uniform ultrahigh frequency plasma surface treatment of a large area is realized. <P>SOLUTION: A high frequency plasma generator is provided with a means for supplying pulse power which is hourly separated to at least two feeding points in a relation of opposite points on transmission of an electromagnetic wave in a pair of the electrodes, generating a plurality of standing waves whose positions of antinodes differ between a pair of the electrodes, and overlapping them. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
