| 摘要 |
PROBLEM TO BE SOLVED: To improve durability of a sensor element in a mechanical quantity sensor vibrating a cone by using an outside excitation method. SOLUTION: The sensor detecting an angular speed from generating Coriolis force by vibrating the cone at a constant cycle uses a constitution applying vibration from the outside of a detection part 1, and fixes a drive part 3 comprising a piezoelectric element and the detection part 1 through a transmission part 2. The transmission part 2 is composed of a body part 21 fixing a bottom face on the drive part 3 and a projection 22 fixing a projection end face 22a on the detection part 1. The projection end face 22a is formed smaller than an exciting face of the detection part 1. In addition, the projection 22 is formed so as to be projected from a part acted by the maximum amplitude of the drive part 3 in the body part 21. A contact region with a strain deforming region in the drive part 3 can be reduced through the transmission part 2. Therefore, a value of stress acted on the detection part 1 can be reduced. COPYRIGHT: (C)2006,JPO&NCIPI
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