| 摘要 |
PROBLEM TO BE SOLVED: To provide a cyclic use method of a developing solution, in which a used TAA (tetraalkylammonium) hydroxide aqueous solution can be cyclically used to be able to effectively use the solution in a developing process which requires precise development. SOLUTION: In the cyclic use method, a used TAA hydroxide aqueous solution obtained from a developing process using a TAA hydroxide aqueous solution as a developing solution is refined to obtain a purified TAA hydroxide aqueous solution, while a high purity TAA hydroxide aqueous solution having≤5 ppb content of each metal ion impurity and≤1 ppm total content of organic impurities with respect to TAA is obtained by using a high purity source material, then the TAA hydroxide aqueous solution and the high purity TAA hydroxide aqueous solution are mixed, and the mixture is circulated to the developing process requiring precision development. COPYRIGHT: (C)2006,JPO&NCIPI |
