摘要 |
PURPOSE:To make the title electromagnet small in size by providing a multipolar correction coil inside the main coil. CONSTITUTION:In a superconducting deflection electromagnet equipped with a main coil 1, with which a charged particle beam will be deflected by generating a magnetic field and multipolar correction coils 31 and 32 with which highly uniform magnetic field is generated on the passing region of a charged beam, multipole correction coils 31 and 32 are provided. For example, in order to cancel the non-uniform magnetic field of the main coil 1, a 4-pole correction coil 31 composed of four banana-shaped coil and a 6-pole correction coil 32 composed of six banana-shaped coils are used. The above-mentioned tetrode correction coil 31 and 6-pole correction coil 32 are provided in the main coil 1. As a result, the 4-pole correction coil 31 and the 6-pole correction coil 32 can be provided on the main coil 1 without projecting to outside, and a cryostat 4 can be made small in size. |