| 摘要 |
PURPOSE:To control the generation of an electric discharge in a heat insulating vacuum closed pipe and to prevent the breakage of the pipe and decrease in the laser output by providing a Ti material of specified shape in the pipe provided around a discharge tube in a metal vapor laser device, etc. CONSTITUTION:A heat insulating layer 6 and the vacuum closed pipe 11 are provided around a discharge tube 2 to improve the heat insulating effect of the tube 2. In this case, the Ti material 15 excellent in gas adsorptivity is set in the pipe 11, plural holes or gaps 16 are provided in the material 15 to form an electric field relieving part, or further an electric field concentrating part consisting of plural sharp protrusions 19 projecting toward the outer peripheral wall 13 is formed on the surface of the material 15. The generation of a discharge in a vacuum vessel 9 is Prevented by the gas adsorptivity of the material 15 itself and the presence of the part 16 for receiving the electric field concentrated on the edge of the material 15 and the electric fieled concentrating part 19, and a decrease in the laser output due to the discharge and the breakage of the pipe 11 are obviated. |
