APPARATUS FOR INSPECTING SUBJECT TO BE INSPECTED

摘要

Provided is a substrate inspecting system wherein a line sensor (38) of a first scanning unit (30) scans through a telecentric lens (40) a vertically viewed image of a surface of a substrate (2) to be inspected. The line sensor (38) of a second scanning unit (32) scans an image of a substrate (2) to be inspected, at an angle tilted to a first direction by a first angle (a) from a direction vertical to the surface to be inspected. The line sensor (38) of a third scanning unit (34) scans an image of the substrate (2) to be inspected, at an angle tilted to a second direction by a second angle (ß) from the direction vertical to the surface to be inspected. A judging section calculates the height of the surface of the substrate (2) to be inspected by using image data obtained by the first scanning unit (30), the second scanning unit (32) and the third scanning unit (34).