RETICLE BLIND AND EXPOSING APPARATUS USING THE SAME

摘要

A reticle blind and exposure apparatus using the same are provided to form the window area having the pattern various by using the plurality of blind bars. The reticle blind comprises two blind plates(10) and plurality of driving parts(20). The blind plate is arranged in order to define the window area. The driving part is connected to each blind plate. The driving part drives independently each blind plate. A plurality of blind bars(30) is equipped in each of a plurality of blind plates. The blind plate is formed with the metal plate like the aluminum plate. Each blind is connected to the linear motor.