发明名称 P-channel MOS transistor and fabrication process thereof
摘要 A p-channel MOS transistor includes a gate electrode formed on a silicon substrate in correspondence to a channel region therein via a gate insulation film, the gate electrode carrying sidewall insulation films on respective sidewall surfaces thereof, and source and drain regions of p-type are formed in the substrate at respective outer sides of the sidewall insulation films, wherein each of the source and drain regions encloses a polycrystal region of p-type accumulating therein a compressive stress.
申请公布号 US7518188(B2) 申请公布日期 2009.04.14
申请号 US20050180791 申请日期 2005.07.14
申请人 FUJITSU MICROELECTRONICS LIMITED 发明人 SHIMA MASASHI;SHIMAMUNE YOSUKE;HATADA AKIYOSHI;KATAKAMI AKIRA;TAMURA NAOYOSHI
分类号 H01L29/76 主分类号 H01L29/76
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