发明名称 SEMICONDUCTOR SUBSTRATE AND METHOD FOR PRODUCING A SEMICONDUCTOR COMPONENT
摘要 A semiconductor substrate for producing a semiconductor component comprises a base (31), produced of a first semiconductor material and having a first lattice characteristic, and a membrane (32) that is integral with the base and that is movably received relative to the base (31). The membrane (32) forms a surface on which a layer (38), produced of a second semiconductor material and having a second lattice characteristic, is arranged. The second lattice characteristic is different from the first lattice characteristic. In an embodiment of the invention, the membrane (32) has a central membrane zone (34) which is supported by the base (10) from below. The invention further relates to a method for producing a semiconductor component using a semiconductor of this type.
申请公布号 WO2009010265(A3) 申请公布日期 2009.04.09
申请号 WO2008EP05752 申请日期 2008.07.15
申请人 INSTITUT FUER MIKROELEKTRONIK STUTTGART;BURGHARTZ, JOACHIM 发明人 BURGHARTZ, JOACHIM
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
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