| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater providing high throughput by improving temperature rise and fall characteristics, with high rigidity at a comparatively low cost. SOLUTION: The heater, for heating a semiconductor or a flat panel display, is a heating element unit which is made by insulation coating a heating element consisting of metal foil with polyimide, and has a soaking plate having a placing surface for placing a heated object. The soaking plate consists of ceramics or ceramic metal complex, the soaking plate and the heating element unit are welded or bonded on a surface of the opposite side from the placing surface of the soaking plate. A surface of the opposite side from the placing surface of the soaking plate has a surface roughness Ra of 0.02μm or more and 1.0μm or less. COPYRIGHT: (C)2011,JPO&INPIT
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