| 摘要 |
PROBLEM TO BE SOLVED: To provide a position measuring apparatus capable of precisely measuring a position of a measurement object even when an image of the measurement object photographed is blurry. SOLUTION: The position measuring apparatus 1 includes a stage 72 on which the measurement object W is set and which has a marker 90 for emitting a plurality of refection light portions, a light irradiation section 48 for irradiating the marker 90 with light, a plurality of imaging devices 20, 21 for photographing the measurement object W and the marker 90 in different directions of sight line, a point spread function computing section 36 which extracts a marker image 100 of the marker 90 from a photographed image B taken by the imaging devices 20, 21 and obtains a point spread function from the marker image 100, an image generating section 37 for generating a transformed image G by applying an image transformation using the point spread function to the photographed image B, and a position calculating section 39 for calculating the position of the measurement object W on the basis of the transformed image G generated. COPYRIGHT: (C)2011,JPO&INPIT
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