发明名称 |
A HYBRID THERMAL DESTRUCTION PROCESSES COUPLED WITH ADSORPTIVE ENRICHED UNITS FOR THE REMOVAL OF PERFLUOROCOMPOUNDS OFF GASES FROM SEMI-CONDUCTOR PRODUCTION INDUSTRY |
摘要 |
PURPOSE: A hybrid thermal destruction processes coupled with adsorptive enriched units for the removal of perfluorocompounds gases from semi-conductor production industry is provided to reduce the amount of the process energy by heat-dissolving the concentrated perfluorocompounds by incineration and plasma. CONSTITUTION: The fluorinated gas(S1) is adsorbed by the absorbent from the exhaust gas. The absorbed fluorinated gas is detached from the absorbent. The detached perfluorinated gas is removed by the thermal process. The absorbent is the compound of one or two kinds selected output the A1216 activated charcoal, the A836 activated charcoal, and the A1261 activated charcoal.
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申请公布号 |
KR20100128778(A) |
申请公布日期 |
2010.12.08 |
申请号 |
KR20090047382 |
申请日期 |
2009.05.29 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE, JOONG KEE;CHO, BYUNG WON;LEE, HWA YOUNG;LEE, SANG DEUK;WOO, JOO MAN;CHANG, WON YOUNG;YOO, KYUNG SEUN |
分类号 |
H01L21/02;H01L21/205;H01L21/3065 |
主分类号 |
H01L21/02 |
代理机构 |
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