| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an abrasive slurry containing alumina and silica, which can inhibit caking of an abrasive and a change in particle diameters. <P>SOLUTION: The method of manufacturing the abrasive slurry includes: a step (1) of mixing alumina, water and a potential adjuster so as to obtain alumina slurry with zeta (surface) potential of alumina of 48 mV or less and a content of alkali metal and alkaline earth metal of 250 ppm or less; and a step (2) of mixing the alumina slurry obtained in the step (1) with silica so as to obtain the abrasive slurry containing alumina and silica. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
