| 摘要 |
PROBLEM TO BE SOLVED: To reduce the risk of causing thickness unevenness in a film structure contained in a composite structure.SOLUTION: This film deposition apparatus is equipped with an aerosol producer, a nozzle, an aerosol delivery tube and particle dispersing equipment 20. The aerosol producer produces aerosol by dispersing particles in gas. The nozzle has an aperture spouting the aerosol led from the aerosol producer. The aperture has a shape wherein the dimension in the Y-direction is longer than that in the Z-direction in a cross section perpendicular to the X-direction corresponding to the traveling direction of the aerosol. The aerosol delivery tube leads the aerosol from the aerosol producer to the nozzle. The particle dispersing equipment 20 is installed in the aerosol delivery tube and comprises first, second and third slits 22, 23 and 24 passable of the aerosol. Each slit has a shape wherein the dimension in a direction perpendicular to the Y-direction in the cross section is longer than that in a direction perpendicular to the direction. |
