| 摘要 |
A protective filter (A) for vacuum pump comprises: a casing (1) being supplied exhaust gas (H) including microparticles and accommodating microparticle collection liquid (4) inside; a rotating drum (2) having a rotating cylinder (16) and a basket (19), being filled a filler (5) for collecting the microparticles, rotating inside the casing (1) immersing a part of the filler (5) to the microparticle collection liquid (4), the exhaust gas (H) supplied into the casing (1) flows into the rotating cylinder (16) contacting the microparticle collection liquid (4) at a surface of the filler (5), the exhaust gas (H) is discharged through an opening (6) provided at one end of the rotating cylinder (16); a roller (40) rotating the basket (19); and a connecting pipe (7) having an opening facing the opening (6) of the rotating cylinder (16), fixed to the casing (1), and connected to the vacuum pump (C). |
