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发明名称
用以在一或多个晶圆上实行液体及随后的乾燥处理之系统及方法
摘要
本发明系关于用于在一处理腔室中处理微电子基板的系统,该等系统并入自一湿式处理过渡至一乾燥处理(尤其是由冲洗过渡至乾燥)的改良技术。经由一避免直接于该等基板上进行净化的路径而移除在一湿式处理后残留于流体供应管线中之剩余液体之至少一部分。本发明中亦包括有相关之方法。
申请公布号
TWI393177
申请公布日期
2013.04.11
申请号
TW094119071
申请日期
2005.06.09
申请人
艾福斯埃国际公司 美国
发明人
艾恩C 班森;艾瑞克D 欧森;道格拉斯S 史贝司
分类号
H01L21/30
主分类号
H01L21/30
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
美国
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