MOEMS APPARATUS AND A METHOD FOR MANUFACTURING SAME

摘要

An apparatus is formed from a double active layer silicon on insulator (DSOI) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer. The comb drive may be used to impart a tilting motion to a micro-mirror. The method of manufacturing provides comb teeth exhibiting an aspect ratio greater than 1:20, with an offset distance between comb teeth of the first and second combs that is less than about 6 μm.

主权项

1. An apparatus, comprising:
a double active layer silicon on insulator substrate including a first active layer separated from a second active layer by an insulating layer; a first plurality of comb teeth formed in the first active layer and defined by a first plurality of cavities; a second plurality of comb teeth formed in the second active layer and defined by a second plurality of cavities; wherein an aspect ratio of the first and second pluralities of cavities defining the first and second pluralities of comb teeth is greater than 1:20.