Raman microscope and electron microscope analytical system

摘要

The invention relates to system using number of analytical devices such as electron microscope (4), Raman microscope (6), ion beam column (20) and scanning probe microscope (24) for sample (3) analysis concurrent, consecutive or with the mutual correlation of the analysis performed by the different devices in the same sample (3) area using the connection of the Raman microscope optical objective lens (11) and objective manipulator (17), that significantly reduces time needed for analyzing by Raman microscope (6) together with other devices and maintains high quality of the sensed signals comparable to stand alone analytical devices.