Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and manufacturing method thereof

摘要

There is provided a liquid ejecting head including: a flow path formation substrate on which a pressure generation chamber communicating with nozzle openings for discharging liquid is provided; and a piezoelectric element which is provided on the flow path formation substrate and includes a piezoelectric layer, an electrode, and a wiring layer connected to the electrode, in which the wiring layer includes an adhesion layer which is provided on the electrode side and contains at least titanium and tungsten, and a conductive layer containing copper which is provided on a side of the adhesion layer opposite the electrode.

主权项

1. A piezoelectric device comprising:
a piezoelectric element including a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode; a wiring layer connected to one of the first electrode and the second electrode, the wiring layer including an adhesion layer formed so as to overlap with the one of the first electrode and the second electrode and containing at least one of titanium and tungsten, and a conductive layer containing copper and provided on the adhesion layer; a first palladium layer containing palladium and formed on at least a portion of the conductive layer; a nickel layer containing nickel and formed on the first palladium layer; a gold layer containing gold and formed on the nickel layer; and an external wire connected to the gold layer.