| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a polishing pad grooving machine capable of reliably removing chips twining around a cutting edge, and capable of improving the efficiency of recovering the chips. <P>SOLUTION: The polishing pad grooving machine includes: a cutting device 2 where the cutting edge 20 for cutting and forming multi-thread grooves on a surface of a polishing pad 1 by acting on the surface of polishing pad 1; a rear side air blowing device 3, which is positioned at the rear side in the cutting direction of the cutting edge 20, and which blows air toward the direction of the cutting edge 20; and a dust introduction unit 4, which is positioned at the front position in the cutting direction of the cutting edge 20 for suction and collection of the chips generated by the cutting. The dust introduction unit 4 includes: a dust collecting box 40 having a dust collecting port 40a which can be set at the position opposed to the surface of the polishing pad 1; and a straightening vane 41 for guiding the chips upward to the dust collecting port. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
