发明名称 MAGNETORESISTIVE EFFECT ELEMENT, METHOD FOR MANUFACTURING MAGNETORESISTIVE EFFECT ELEMENT AND MAGNETIC MEMORY
摘要 A magnetoresistive effect element according to an embodiment of the present invention comprises first and second magnetic layers, an intermediate layer between the first and second magnetic layers, and a side wall protective film which is on a lateral surface of the first magnetic layer and has a multilayer structure. The side wall protective film comprises: a first protective film which is provided on the lateral surface of the first magnetic layer and contains, as a main component, a first element that has an atomic number larger than the atomic number of a first magnetic element that constitutes the inside of the first magnetic layer; and a second protective film which is provided on a surface of the first protective film, said surface being on the reverse side of the first magnetic layer-side surface, and contains, as a main component, a second element that has an atomic number smaller than the atomic number of the first magnetic element.
申请公布号 WO2015141673(A1) 申请公布日期 2015.09.24
申请号 WO2015JP57889 申请日期 2015.03.17
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YAKABE, MEGUMI;OHSAWA, YUICHI;KAMATA, CHIKAYOSHI;KASHIWADA, SAORI;ITO, JUNICHI;KITAGAWA, EIJI
分类号 H01L43/08;H01L21/316;H01L21/318;H01L21/8246;H01L27/105;H01L29/82;H01L43/10;H01L43/12 主分类号 H01L43/08
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