发明名称 |
MAGNETORESISTIVE EFFECT ELEMENT, METHOD FOR MANUFACTURING MAGNETORESISTIVE EFFECT ELEMENT AND MAGNETIC MEMORY |
摘要 |
A magnetoresistive effect element according to an embodiment of the present invention comprises first and second magnetic layers, an intermediate layer between the first and second magnetic layers, and a side wall protective film which is on a lateral surface of the first magnetic layer and has a multilayer structure. The side wall protective film comprises: a first protective film which is provided on the lateral surface of the first magnetic layer and contains, as a main component, a first element that has an atomic number larger than the atomic number of a first magnetic element that constitutes the inside of the first magnetic layer; and a second protective film which is provided on a surface of the first protective film, said surface being on the reverse side of the first magnetic layer-side surface, and contains, as a main component, a second element that has an atomic number smaller than the atomic number of the first magnetic element. |
申请公布号 |
WO2015141673(A1) |
申请公布日期 |
2015.09.24 |
申请号 |
WO2015JP57889 |
申请日期 |
2015.03.17 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
YAKABE, MEGUMI;OHSAWA, YUICHI;KAMATA, CHIKAYOSHI;KASHIWADA, SAORI;ITO, JUNICHI;KITAGAWA, EIJI |
分类号 |
H01L43/08;H01L21/316;H01L21/318;H01L21/8246;H01L27/105;H01L29/82;H01L43/10;H01L43/12 |
主分类号 |
H01L43/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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