A PROBE CARD PRE-HEATING DEVICE USING INDUCTIVE HEAT AND PROBE TEST APPARATUS USING THE SAME

摘要

The present invention provides a probe card case and a probe test apparatus. A probe card preheating device according to the present invention includes the probe card case which includes a case body and a cover which defines a probe card installation part with the case body, outer walls which have case holding spaces to insert the probe card, an induction heating unit which heats the probe card received in the probe card installation part on at least one outer wall, and a power supply unit which supplies power to the induction heating unit. The probe card is preheated at a desired temperature before a probe test by arranging the induction heating unit around the probe card.