Substrate processing method

摘要

A substrate processing method includes rotating a substrate about a central axis thereof; starting irradiation of a surface of the substrate with soft X-rays; simultaneously with or after starting the irradiation of the surface of the substrate with the soft X-rays, starting supply of pure water onto the surface of the substrate; stopping the supply of the pure water onto the surface of the substrate; and then stopping the irradiation of the surface of the substrate with the soft X-rays.

主权项

1. A substrate processing method comprising:
pressing a substrate against a polishing surface while supplying slurry onto the polishing surface to polish the substrate until a structure including at least a dielectric film is formed on the polished surface of the substrate; rotating the substrate having the polished surface about a central axis thereof; starting irradiation of the polished surface of the substrate with soft X-rays; simultaneously with or after starting the irradiation of the polished surface of the substrate with the soft X-rays, starting supply of pure water onto the polished surface of the substrate, wherein said irradiation with the soft X-rays and said supplying of the pure water onto the polished surface suppresses electrostatic charge on the dielectric film; stopping the supply of the pure water onto the polished surface of the substrate; and then stopping the irradiation of the polished surface of the substrate with the soft X-rays.